MEMS

Micro-electromechanical systems (MEMS) combine computers with tiny mechanical devices such as sensors, valves, gears, mirrors, and actuators Embedded in semiconductor chips.

MEMS are made up of components between 1 to 100 micrometres in size (i.e. 0.001 to 0.1 mm).

MEMS devices generally Range in size from 20 micrometres to a millimetre (i.e. 0.02 to 1.0 mm). They usually consist of a central unit that processes data (the microprocessor) and several components that interact with the surroundings such as microsensors.

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